2~4inch, 6~8inch, 12inchInch Multi Flow ProcessCompact and Small Size Sapphire,Glass, SiPSS,MEMS,Bumping ...    More ...

2~4inch, 6~8inch, 12inch
Inch Multi Flow Process
Compact and Small Size
Sapphire,Glass, Si
PSS,MEMS,Bumping process
Programmable EBR, Back Rinse as well as Bowl
Bar Code System (Optional) and USB connection
Programmable EBR and Back Rinse
General Specification
1) Main frame with system controller
a) System Controller
- User Friendly Software Based on PC Windows XP
- User Interface : 15” LCD Touch Screen

b) Program Recipes
- Recipe Editing / Storage
: Process, Flow, Dummy Dispense and Recipe can be made and modified by Operation Panel
- Flow Recipe
: Almost Operation of Machine can done by Recipe on Touch Panel
- Recipe Capacity
: Unit Recipe : 50 sets each of 20 step
c) Throughput: > 60 wafers, depend upon process
2) System lay-out
a) 2~4inch Main Body Size : 1,700(W) X 1,400(D) X 1,600(H)
b) 12inch Main Body Size : 2,100(W) X 2,000(D) X 2,100(H)

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