Applications: ■Scanning Interferometry ■Surface structure analysis ■Disc-drive-test ■Autofocus ...    More ...

Applications:
■Scanning Interferometry
■Surface structure analysis
■Disc-drive-test
■Autofocus systems
■Confocal microscopy
■Biotechnology
■Semiconductor testing
 

P72 is high-speed, piezo-driven microscope objective nanofocusing/scanning devices, providing a positioning and scanning range of 100 um with sub-nanometer resolution and very high motion of linearity.
 

Technical Data:
Type P72.Z100S P72.Z100K Units
Active axes Z Z  


Sensor SGS -  


Nominal travel range（0~+120V） 80 80 μm±20%
Max travel range（-20~+150V) 110 110 μm±20%
Resolution 5 2.5 nm
Closed-loop linearity 0.1 - %F.S.
Repeatability 0.05 - %F.S.
Stiffness in motion direction 1.4 1.4 N/μm±20%
Unloaded resonant frequency 350 350 Hz±20%
Resonant frequency @ 200g 120 120 Hz±20%
El.capacitance 3.6 3.6 μF±20%
Material Steel Steel  


Weight 150 150 g±5%
 

P72 Piezo Flexure Objective Scanner is equipped with high-accuracy SGS sensor,  has very high resolution and positioning resolution, and can scan fast to position within 100um travel. Fast response, compact structure, stability, free of friction and easy installation with a variety of thread interface, which can be conveniently connected with various specifications lens.

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