P11 is a small-volume 1~3 axes piezo nanopositioning stage. It adopts a nofriction flexible hinge guiding ...    More ...

P11 is a small-volume 1~3 axes piezo nanopositioning stage. It adopts a nofriction flexible hinge guiding mechanism and amplified-drive mechanism to ensure 100μm displacement. Closed-loop version could achieve positioning accuracy up to nano-scale. It has excellent control precision, the resolution and stability could reach nanometer level, stabilization time is only milliseconds, the stage is non-magnetic material, and is not affected by the magnetic field in operating.
 
Technical Data:

                                           Type
                                           S-Closed loop
                K-Open loop
                                          P11.X100S
                P11.X100K
                                          P11.Z100S
                P11.Z100K
                                          P11.Z300S
                P11.Z300K
                                          P11.XY100S
                P11.XY100K
                                          P11.XZ100S
                P11.XZ100K
                                          P11.XYZ100S
                P11.XYZ100K
                                          Units
                     
                                      Active axes
                                          X
                                          Z
                                          Z
                                          X, Y
                                          X, Z
                                          X, Y, Z
                                           
                     
                                      Travel range(0~120V)
                                          80
                                          80
                                          240
                                          80/axis
                                          80/axis
                                          80/axis
                                          μm±10%
                     
                                      Travel range(0~150V)
                                          100
                                          100
                                          300
                                          100/axis
                                          100/axis
                                          100/axis
                                          μm±10%
                     
                                      Sensor
                                          SGS/-
                                          SGS/-
                                          SGS/-
                                          SGS/-
                                          SGS/-
                                          SGS/-
                                           
                     
                                      Closed/open loop resolution
                                          3/1
                                          3/1
                                          8/2.5
                                          3/1
                                          3/1
                                          3/1
                                          nm
                     
                                      Linearity
                                          0.05/-
                                          0.05/-
                                          0.5/-
                                          0.1/-
                                          0.1/-
                                          0.1/-
                                          %F.S.
                     
                                      Repeatability
                                          0.02/-
                                          0.02/-
                                          0.12/-
                                          0.03/-
                                          0.03/-
                                          0.05/-
                                          %F.S.
                     
                                      Pitch/yaw/roll
                                          <10
                                          <10
                                          <10
                                          <10
                                          <10
                                          <10
                                          μrad
                     
                                      Push/pull force
                                          30/10
                                          30/10
                                          50/4
                                          25/10
                                          25/10
                                          30/5
                                          N
                     
                                      Stiffness
                                          0.3
                                          0.3
                                          0.25
                                          X0.25/Y0.3
                                          X0.25/Z0.3
                                          X0.25/Y0.3/Z0.2
                                          N/μm±20%
                     
                                      Unloaded resonant frequency
                                          0.3
                                          0.7
                                          0.12
                                          X0.2/Y0.3
                                          X0.2/Z0.3
                                          X0.2/Y0.3/Z0.18
                                          kHz±20%
                     
                                      Closed/open-loop unloaded step time
                                          10/0.8
                                          10/0.8
                                          10/0.8
                                          15/0.8
                                          15/0.8
                                          20/0.8
                                          ms±20%
                     
                                      Closed-loop operating frequency (-3dB)
                                          70 (at 100g load)
                                          50 (at 100g load)
                                          -
                                          50 (unloaded)
                                          -
                                          -
                                          Hz±20%
                     
                                      Load capacity
                                          0.8
                                          0.8
                                          0.4
                                          0.7
                                          0.7
                                          0.6
                                          kg
                     
                                      El. capacitance
                                          1.8
                                          1.8
                                          5.4
                                          1.8/axis
                                          1.8/axis
                                          1.8/axis
                                          μF±20%
                     
                                      Material
                                          Steel, Aluminum
                                           
                     
                                      Mass
                                          100
                                          100
                                          230
                                          170
                                          170
                                          230
                                          g±5%
                     
    

Less ...