http://www.coremorrow.com/en/


P76 series piezoelectric objective scanner features a large load capacity up to 500g, Z-axis linear motion range up to 100μm, adopting flexible hinge design mechanism, no friction, good linearity, high closed-loop positioning accuracy. The seperate thread adapter design accommodates a wide range of microscopes.


Characteristics

 Travel to 100μm
 Load capacity to 500g
 Millisecond response time
 Closed loop for higher repeatability

 Excellent focusing stability

Applications

 Adjustment focus
 Image processing
 Confocal microscope
 Semiconductor inspection

 Laser processing
  Interference shape measurement





    Technical data
Models
S-Closed loop
K-Open loop
P76.Z100S
P76.Z100K
P76.Z50S
P76.Z50K
Units

Active axis
Z
Z
 

Travel range（0~120V）
80
60
μm±20%

Travel range（0~150V）
100
75
μm±20%

Sensor type
SGS/-
SGS/-
 

Resolution
5/2.5
15/2.5
nm

Linearity
0.05/-
0.1/-
%F.S.

Repeatability
0.02/-
0.05/-
%F.S.

Push/pull force
70/10
-
N

Stiffness
0.8
-
N/μm±20%

Unloaded resonant frequency
800
1800
Hz±20%

Unloaded step time
5/2
1.6/1
ms±20%

Closed-loop unloaded operating frequency
10% travel
400
-
Hz±20%

100% travel
50
-

Load capacity
0.5
0.5
kg

El.capacitance
7.2
7.2
μF±20%

Material
Aluminum, Steel
 

Mass
520
550
g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.





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