Small-size piezo controller features compact size, which is suitable for small spaces and multi-circuit closed-loop control requirements, and is suitable for the control of piezoelectric products such as piezoelectric actuators, piezoelectric deflection mirrors, piezo nanopositioning stage, piezo objective scanner and etc.
Small-size piezoelectric controller is small, and can be used in industrial application, like wafer cutting, AOI, SPI.
N31 linear piezoelectric motor adopts stick-slip principle, and piezo step direct drive. The linear motion range can be 6、10、25、50 or 100mm, and the resolution can reach sub-nanometer level. Closed-loop servo sensors (grating sensor) for high positioning accuracy and motion platform are available.
Characteristics
Large blocking force
Automatic zero position by software operation
Optional grating sensor
Wear-resistant material
vacuum non-magnetic compatible
Closed-loop automatic return after accidental touch
Optional 2 or 3 axes
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